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Voir le flyer adixen Pod Analyser | Télécharger |
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Demande de devis | Submit |
Contrôle de la contamination moléculaire gazeuse
adixen Pod Analyser (APA)
The APA 302 (adixen Pod Analyzer) is a unique in-line FOUP AMC monitoring solution to:
•Detect in 2 mn and characterize at FOUP and wafer level
•Improve understanding of the wafer environment
•Provide real time data to optimize cleaning techniques
BENEFITS
•Real time monitoring
•High Sensitivity (sub ppbv detection)
•No FOUP modification Needed
•High Throughput
For more information, please contact Emmanuelle VERAN: emmanuelle.veran@adixen.fr
