Documentation : |
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Voir le flyer Adixen Pod Regenerator | Télécharger |
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Demande de devis | Submit |
Solution de décontamination
adixen Pod Regenerator (APR)
The APR 4300 design results in:
• Revolutionary process
• Flexible configuration
• World class particle performance
• SEMI S2 compliance
• 100 wafers / cycle
APPLICATIONS
• After FEOL Etch
• After BEOL Etch
• After implantation
